Lobster185Z340D-T2X0-C Wafer Robot

Type

Two-armed

Applied Specification

~300

Rated Payload

2KG

Degree of Freedom

4

Range of Motion

Lifting Axis (Z)

340mm

Rotating Axis (T)

340deg

Stretching Axis (R)

360mm

Maximum Speed

Lifting Axis (Z)

400mm/s

Rotating Axis (T)

260deg/sec

Stretching Axis (R)

1500mm/s

Features

1) Cleanroom environment.

2) Robotic Arm Length: 135mm; 185mm.

3) Two-armed structure shortens the operation time of wafer replacement.

4) Mapping Sensor to detect if wafers are there, if overlying or tilting.

5) Specifications can be customized according to requirements.

Re-positioning Accuracy

±0.1mm

Leak Rate

—

Cleanliness

Class 100

Interface

I/O interface

4 configurable digital inputs;

4 configurable digital outputs;

8 general digital inputs;

8 general digital outputs;

(Re-extensible 8 digital inputs/outputs).

Ethernet

1

USB

2

RS232/RS485

1

Communication Protocol

Modbus-RTU/TCP、Socket

Arm Length (R)

185mm

Vertical Stroke (Z)

340mm

Machine Table Height (H)

605mm

Actuator Length (L)

Demand-based

Height from Table to Stroke’s Down Position (H)

250mm